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eFLOW Series Antistatic Device for Ultra-pure Water

Antistatic Device for Ultra-pure Water

The eFLOW Series controls the specific resistance value of ultra-pure water by supplying carbon dioxide through a hollow fiber gas permeable membrane uniquely developed by DIC. This makes it possible to avoid dust re-adhering, and to prevent static electricity damage to the substrate pattern.

* Patent Pending

Features

  • The simple structure results in few breakdowns.
  • With the unique pipe distribution system, the specific resistance value is easily controlled and has excellent stability.
  • Long lifespan of the carbon dioxide gas injection module. (5 year warranty, manufactured by DIC)

Major Applications

  • Mask, reticle cleaning
  • Scrubber cleaning
  • High-pressure jet cleaning
  • Cleaning in the dicing stage
  • Cell cleaning

Product Lineup

Panel Mount Type (P Series)

The P Series is rack mountable in EIA (Electronic Industries Alliance) standard-compliant rack. For 1AP type, the standard device has a fully cleanable specification for the joints. For the 2AP type, fully cleanable support is available as an option.

Panel Mount Type (P Series) Image

eFLOW 2AP-B01

Panel Mount Type (P Series) Dimensions

Dimensions (Unit: mm)

Model List

Treatment Flow Rate (L/min) Model Module
1-16 1AP-B02 PF-001L-NA x 1 module
5-30 2AP-B01 PF-001L-ND2 x 2 modules
10-50 3AP-B01 PF-001L-ND3 x 2 modules

Cabinet Type (C Series)

The C Series includes a cabinet where two CO2 canisters can be installed. The specific resistance sensor is contained in the cabinet and the water pipe can be directly connected to the usage point from eFLOW.

Panel Mount Type (C Series) Image

eFLOW 2AP-B01

Panel Mount Type (C Series) Dimensions

Dimensions (Unit: mm)

Model List

Treatment Flow Rate (L/min) Model Module
1-16 1AC-P101 PF-001L-NA x 1 module
5-30 2AC-P101 PF-001L-ND2 x 2 modules
10-50 3AC-P101 PF-001L-ND3 x 2 modules

Device Principle

Device Principle

The specific resistance value of ultra-pure water can be controlled by adjusting the blend ratio of ultra-pure water and water saturated with carbon dioxide gas produced by the carbon dioxide gas injection module (see the upper-right diagram).

CO2 Dissolution Principle

DIW flows through the inside of the hollow fiber membrane in the module. At that time, CO2 gas from outside the hollow fiber membrane dissolves into the DIW. The dissolved CO2 gas is ionized in the DIW, imparting conductivity to the DIW that can eliminate static electricity. Because the device uses a fine hollow fiber membrane that has been bundled, it has the necessary surface area to efficiently dissolve carbon dioxide gas.

2AP, 2AC/3AP, 3AC

2AP, 2AC/3AP, 3AC

1AP, 1AC

1AP, 1AC

Carbon Dioxide Gas Injection Module (Internal Perfusion) Manufactured by DIC

Carbon Dioxide Gas Injection Module (Internal Perfusion) Manufactured by DIC

  • eFLOW2, 3A* types contain two carbon dioxide gas injection modules.

Performance Data

Usage Flow Rate Range by eFLOW Type

Usage Flow Rate Range by eFLOW Type

Pressure Loss per Type

Pressure Loss per Type

Dicing Example

Dicing Example

Scrubber Cleaning Example

Scrubber Cleaning Example

  • *Specific resistance value performance is not guaranteed when the flow rate fluctuates.
  • *The graphs above are reference data. Performance and characteristics may differ according to usage conditions.

Custom Specifications/Devices

  • Clean specification (flow rate up to 30 L/min)
  • Low specific resistance (0.25 to 0.05 MΩ·cm) types
  • Small/separate electrical section types
  • Large flow rate (100 L/min) types
  • Other types, customizable

For detailed product information about these membrane products, visit SEPAREL website.

separel.com

For inquires related to these products
For inquires via the web Contact Form
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